Powerful enough for the most demanding industrial applications, yet simple enough for routine measurements. There's no other AFM like it in the world today
Easy-To-Use. State-of-the-Art.

The AFM Technology Breakthrough for 300 mm Wafer Inspection

AFM technology assists the development and manufacture of 300 mm (12 inch) wafers. However, this capability must be balanced with total automation and ease-of-use. The one system to provide all this, including robotics, is the NanoLyser 300 AFM.
Nanolyser 300

300 mm stage allows complete
investigation of a whole wafer

Prealigned probe with detector
permits easy tip replacement

90° and 45° color optical
microscope

This is the first microscope to transition AFM technology from the domain of scientific research into industrial environments.

Everyone Gets Results With NanoLyser

Experts can use the NanoLyser 300 to make all the critical images and measurements they need. Yet technicians can routinely use this advanced instrument to get the precise dimensions they require.

The Array Of Features Is Impressive

Standard in the NanoLyser 300 are cantilevers prealigned to the detector, so probe replacement is simply fit-and-forget. The stage system permits investigation of a complete 300 mm wafer, including coarse positioning with high precision. There's CCD color optical viewing at 90º and 45º. And the scan range is 100 µm in XY with linearization, enabling images to yield metrological measurements. NanoLyser also incorporates a large 15 µm Z range, so large steps and tilt can be accommodated.

NanoLyser Configures To Your Needs

We designed NanoLyser with an open modular architecture, making this remarkable instrument easy to expand or modify. NanoLyser can be combined with other SPM heads, such as STM or electrostatic imaging. And finally, the software is based on Windows NT, so microscope control and image processing can be customized easily.